Scan Plate

MIT refurbishes Scan Plate Assemblies for NV-3200 and NV-6200 series ion implanters.


  • High Polished Metal reduces surface area and reduces the chance of arcing


  • Refurbishment - includes new standoffs and jig alignment

Product Description

  • All Metal surfaces on this unit are highly polished to reduce surface area, promote faster pump down and reduce the incidence of arcing