Scan Plate
MIT refurbishes Scan Plate Assemblies for NV-3200 and NV-6200 series ion implanters.
Features
- High Polished Metal reduces surface area and reduces the chance of arcing
Services
- Refurbishment - includes new standoffs and jig alignment
Product Description
- All Metal surfaces on this unit are highly polished to reduce surface area, promote faster pump down and reduce the incidence of arcing